Temperature-programmed desorption/decomposition (TPD) was employed to obtain the moisture content and outgassing kinetics of TR55, a silica-filled cross-linked polysiloxane. The total moisture content of TR55 in the as-received state and after 20-30 min of vacuum pumping in the load-lock prior to TPD was measured to be on the order of 0.35 wt%. Physisorbed H2O and chemisorbed H2O account for about 13.2 and 86.8%, respectively, of the 0.35 wt% measured moisture content. H2O outgassing models based on the kinetics measured from TPD experiments suggest that loosely bound chemisorbed water outgasses in a dry environment slowly but continuously over many decades at or a little above room temperature. However, physisorbed water can be easily pumped out in a matter of hours at around 400 K. (C) 2004 Elsevier Inc. All rights reserved.