화학공학소재연구정보센터
Thin Solid Films, Vol.444, No.1-2, 99-103, 2003
Preparation of carbon films from organic solutions by pulsed arc discharge at atmospheric pressure
The synthesis of carbon films from organic solutions, including methanol, ethanol and acetone, has been demonstrated using pulsed arc discharge at atmospheric pressure and substrate temperatures of less than 150 degreesC. The effects of the applied potential, substrate temperature and organic solution on the structure and quality of the deposits have been investigated by scanning electron microscopy, infrared (IR) and Raman spectroscopy. IR spectra confirm that a polymer-like phase has been co-deposited in carbonaceous deposits. Increasing the substrate temperature is useful for removing polymer from the deposits. Higher applied potential and lower solution concentration are more favorable for the deposition of carbon films with diamond phase. It has been found that methanol is better than ethanol and acetone for preparation of carbon films containing the diamond phase. In addition, a growth rate of 3 nm per pulse has been obtained. (C) 2003 Elsevier Science B.V. All rights reserved.