Thin Solid Films, Vol.442, No.1-2, 36-39, 2003
Assessment of discharges for large area atmospheric pressure plasma-enhanced chemical vapor deposition (AP PE-CVD)
Different types of dielectric barrier discharges are evaluated for atmospheric pressure plasma chemical vapor deposition (AP PE-CVD). Special focus is on surface and coplanar dielectric barrier discharges. (C) 2003 Elsevier B.V. All rights reserved.