In the present work the microstructure of anatase TiO2 film deposited on LaAlO3 and SrTiO3 substrates by pulse laser ablation was investigated using high-resolution transmission electron microscopy (HRTEM) and electron diffraction analysis. The experimental observations reveal the structural features of the interface between the film and the substrate and three main types of crystal defects in the anatase TiO2 film. Observation of the interface showed that the anatase was epitaxially grown on the substrates although defects, such as dislocations and distorted regions can be observed near the interface. Using HRTEM observation several types of defects were found in the deposited film. These defects include both dislocations with the (112) and (001) planes as extra atom planes and micro-twins with the (112) plane as the twin plane. (C) 2003 Elsevier B.V. All rights reserved.