Very thin (similar to100 nm), magnetron sputtered TiN films show excellent anticorrosion behavior with a corrosion current of the order of nA/cm(2) in a 0.6 M NaCl solution in the passive stage, a dissolution rate of 43.5 nm/yr, and no signs of breakdown or the potential for pitting. These excellent properties are attributed to the absence of pinholes or micropores in the structure. The results obtained by the electrochemical impedance technique show almost perfect capacitive behavior of the films over a wide range of frequencies. Modeling of the results by a series-parallel RC circuit gave excellent results, i.e., close to those of an ideal capacitor for series resistance, parallel resistance and the relative dielectric constant. (C) 2003 American Vacuum Society.