In order to investigate the effect of atomic oxygen exposure of an aluminum alloy on bubble formation during welding, electron beam welding was performed on the samples exposed to atomic oxygen produced by the oxygen plasma method. The change in the aluminum surface due to the exposure was analyzed by auger electron spectroscopy. Due to the exposure of atomic oxygen, the thickness of the aluminum oxide film increases on the surface, and pores are formed during welding. The pores can be formed by the formation of the Al2O gas through the reaction between the aluminum oxide and aluminum in a high vacuum. (C) 2004 Kluwer Academic Publishers.