The interaction of water with self-assembled alkylsilane monolayers on mica substrates has been studied using an atomic force microscope operated in contact, noncontact, and electrical polarization modes. Complete monolayer films were found to be effective in blocking water adsorption. On partially covered surfaces water was found to produce large changes in the conductivity and surface potential of the exposed mica regions. It was also found that water could penetrate films near defects and at island edges.