The outermost atomic layer of perfluorinated thiol monolayers on gold and poly(tetrafluoroethylene) (PTFE) is analyzed by low-energy ion scattering. Absolute quantification of fluorine density in this layer was achieved after calibrating the fluorine signal with a freshly cleaved LiF(100) single crystal. The fluorine density of monolayers of a C8F17-thiol on gold was 1.48 x 10(15) F atoms/cm(2), whereas for PTFE a value of 1.24 x 10(15) F atoms/cm(2) was observed. This difference was explained by the different tilt angles of the thiol on gold and PTFE chains with respect to the surface normal. Both a configurational and a molecular interpretation on the perfluorinated thiol monolayer on gold are given.