An optimized lift-off technique for deposition of Ti strips onto Z- or X-cut LiNbO3 crystal surfaces is proposed by comparing several pretreatments on the Ti-sputtered substrate before carrying out the lift-off procedure. The best result is obtained for the pretreatment of preserving the Ti-sputtered substrate in a container at a temperature of 50-90 degreesC for a duration of several hours. Such a pretreatment can strengthen the adhesion of the Ti metal onto the crystal surface to some extent and hence allow the definition of high-quality Ti strips. The experimental results also revealed that the adhesive force of Ti metal onto the crystal surface depends on the cut version of the crystal. (C) 2004 American Vacuum Society.