화학공학소재연구정보센터
Korean Chemical Engineering Research, Vol.42, No.2, 257-261, April, 2004
졸-겔 공정으로 제조한 Al/Nb2O5 캐패시터의 특성 분석
The Characterization of Al/Nb2O5 Capacitors Prepared by Sol-Gel Process
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초록
졸-겔 공정을 통하여 기존의 Al2O3 대비 유전율이 높으면서 알루미늄의 융점 이하 온도에서 결정화가 가능한 Nb2O5를 알루미늄 에칭박 위에 코팅하여 Al/Nb2O5 전극을 제조하였다. 니오븀에톡시드, 에탄올, 초산, 디에탄올아민, 증류수의 몰비율이 1 : 80 : 0.5 : 1.5 : 1.5일 때 안정하고 균질한 졸을 얻을 수 있었다. Al/Nb2O5 전극의 물리적 및 전기적 특성을 측정하였으며, 동일한 내전압을 기준으로 전기화학적 양극산화로 제조한 Al/Al2O3 전극과 그 특성을 비교하였다. Al/Nb2O5 전극의 특성은 열처리 온도, 열처리 시간, 코팅횟수에 의존하였다. 16 V 내전압을 기준으로 Al/Nb2O5박이 Al/Al2O3박에 비하여 28.3% 정도 우수한 CV적을 나타냈으나 누설전류는 다소 열등하였다.
Al/Nb2O5 electrode was prepared by sol-gel process using dip-coating method. Nb2O5 being higher dielectric constance than Al2O3 and being able to be crystallized below the melting point of aluminum was coated on aluminum etched foil. A stable and uniform sol solution was obtained with the mole ratio of 1 : 80 : 0.5 : 1.5 : 1.5-niobium ethoxide : ethyl alcohol : acetic acid : diethanol amine : distilled water. The physical and electrical characteristics of the Al/Nb2O5 electrode were evaluated and then were compared with those of Al/Al2O3 electrode anodized electrochemically. The characteristics of Al/Nb2O5 electrode depended on a calcination temperature, a calcination time and the number of coating times. On the basis of 16 V withstanding voltage, Al/Nb2O5 electrode was 28.3% higher C·V product than that of Al/Al2O3 but was inferior leakage current to the Al/Al2O3 electrode.
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