Tungsten nanoparticles were produced by ArF excimer laser-assisted chemical vapor deposition from WF6/H-2/Ar gas mixtures. Subsequent pulses excited the gas-phase particles, allowing optical emission spectroscopy to monitor the intensity of the emitted radiation and temperature of the laser-heated particles. A systematic study on size-distributions of the deposited particles, determined by electron microscopy, in connection with emission spectroscopy and rate of deposition measurements is presented, with respect to different partial pressures of the reactants. The rates of deposition of W nanoparticle films were determined by X-ray fluorescence spectroscopy. In addition, the intensity of the scattered 193 nm laser line was also monitored as the partial pressure of H-2 was varied.