This paper presents the results of an experimental stydy of the micromechanisms of fatigue crack nucleation and fatigue fracture in polysilicon MEMS Structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are elucidated as functions of fatigue cycling before discussing the micromechanisms of crack growth and final fracture. (C) 2003 Kluwer Academic Publishers.