Previous Article Next Article Table of Contents Macromolecules, Vol.36, No.18, 6692-6694, 2003 DOI10.1021/ma034397d Export Citation A protocol for the verification of acid generation in 157 nm lithography Scaiano JC, Laferriere M, Ivan MG, Taylor GN [Referenced By] Please enable JavaScript to view the comments powered by Disqus.
