The use of electrochemically structured Al surfaces as sensor arrays for combinatorial chemistry and its detection via microscopic laser techniques from very small volumes has been explored. The methodology is based on three different techniques which will be discussed separately: firstly, attenuated total reflection (ATR) is used in connection with surface-plasmon-polariton (SPP) excitation. A thin Al layer, evaporated on sapphire or quartz and covered with a naturally grown oxide layer, provides an optimum enhancement and confinement of the electrical field close to the surface. This is revealed by calculations and experimental data. Secondly, a Raman microscope is applied, enabling chemical spot analysis in the visible and UV range with a lateral resolution close to the diffraction limit. Finally, its application to investigate electrochemically structured Al films is discussed. (C) 2003 Published by Elsevier Ltd.