Well ordered nano sized pore was fabricated on Si substrate using anodic oxidation method. Carbon nanotubes (CNTs) were grown on the well-ordered anodic aluminum oxide (AAO) template formed on Si substrate using plasma enhanced chemical vapor deposition with acetylene (C2H2). Without catalytic metal on the bottom of the AAO template, CNTs were grown on the top and within a nano-channel of the alumina template at 550degreesC. The effect of process parameters such as plasma intensity, temperature and gas composition on the morphology of CNTs was investigated. (C) 2003 Elsevier Science B.V. All rights reserved.