Rutile and anatase TiO2 films were successfully fabricated in TiOSO, aqueous, solutions containing urea at near room temperature. The molar ratio of urea to Ti (R) in the precursor solutions determined the crystal phase of the TiO2 films. Rapid precipitation from highly supersaturated solutions was inhibited by complexing Ti4+ cations with urea, and continuous thin films of rutile and anatase were constructed on substrates. The specific surface area of the films increased from 170 to 360 m(2)/g with increasing R. The urea affected the specific surface area by selective adsorption on the specific surface of crystallites. (C) 2003 Elsevier Science B.V. All rights reserved.