Using a sol-gel method, rare earth element europium doped lead zirconate titanate thin films with a pure perovskite structure were obtained. The effects of excess lead and pyrolyzing temperature on the crystalline structure of the thin films were investigated using X-ray diffraction. Their ferroelectric and dielectric properties were determined by P-E loop and impedance measurements. The remnant polarization is 23.5 muC/cm(2) and the coercive electric field strength is 5.5 kV/mm. The dielectric constant and the dissipation factor is approximately 950 and 0.07, respectively.