We report a technique of fabrication of Al nanoislands of dimensions as small as 3 nm. Thin Al foils were anodized from both the surfaces under conditions suitable for the growth of porous alumina. Unanodized Al nanoislands were thus formed at the interpore regions and characterized by transmission electron microscopy. The method allows control over the distribution and the size of the nanoscale islands through the parameters of the anodization process, and automatic passivation by surrounding alumina. (C) 2003 American Vacuum Society.