Hybrid thin films containing nano-sized inorganic domain were synthesized from poly(acrylic) and monodispersed colloidal silica with coupling agent. The 3-(trimethoxysilyl)propyl methacrylate (MSMA) was bonded with colloidal silica first, and then polymerized with acrylic monomer to form a precursor solution. Then, the precursor was spin coated and cured to form the hybrid films. The silica content in the hybrid thin films was varied from 0 to 50 wt%. The experimental results showed that the coverage area of silica particle by the MSMA decreased with increasing silica content and resulted in the aggregation of silica particle in the hybrid films. Thus, the silica domain in the hybrid films was varied from 20 to 35 nm by the different mole ratios of MSMA to silica. The results of scanning electron microscope, transmission electron microscope, and elemental analysis support the above results. The prepared hybrid films from the crosslinked acrylic polymer moiety showed much better film uniformity, thermal stability and mechanical properties than the poly(methyl methacrylate) (PMMA) based hybrid materials. Large pin-holes were found in the PM-MA-silica hybrid films probably due to the significant difference on thermal properties between the two moieties or the evaporation of solvent. The refractive index decreased linearly with increasing the silica fraction in the hybrid films. Excellent optical transparence was obtained in the prepared hybrid films. These results show that the hybrid thin films have potential applications as passive films for optical devices.