Nanoindentation measurements are made on thermosetting materials using cantilever deflection vs. piezoelectric scanner position behavior determined by atomic force microscope (AFM). The spring model is used to determine mechanical properties of materials. The generalized Sneddon's equation is utilized to calculate Young's moduli for thermosetting materials at ambient conditions. Our investigations show that the force-penetration depth curves during unloading in these materials can be described accurately by a power law relationship. The results show that the accuracy of the measurements can be controlled within 7%. The above method is used to study oxidation profiles in PMR-15 polyimide. The thermo-mechanical profiles of PMR-15 indicate that the elastic modulus at the surface portion of the specimen is different from that at the interior of the material. It is also shown that there are two zones within the oxidized portion of the samples. Results confirm that the surface layer and the core material have substantially different properties.