Previous Article Next Article Table of Contents Polymer Science and Technology, Vol.14, No.1, 48-56, February, 2003 Export Citation [특집] 반도체 금속배선공정을 위한 저유전율 고분자 재료 Low-k Polymer Materials for Semiconductor Metal Interconnect Process 이원규 Please enable JavaScript to view the comments powered by Disqus.
