Nickel thin films were coated on steel substrates applying both electroless plating and sputter deposition techniques. The deposition rates and thin film properties including crystal structures, microhardness, scratch resistance, and cross section microstructures were determined. The coating thickness of electroless nickel followed a parabolic rate relationship with time whereas that of sputter deposited nickel varied linearly with time. For up to 1 mum coating thickness, the rate of electroless plating is about ten times as fast as that of sputter deposition under the experimental conditions of this study. X-ray diffraction analysis showed that sputter deposited Ni had clear crystallinity and electroless plated Ni was amorphous. The microhardness of sputter deposited Ni is higher than that of electroless plated Ni. Scratch tests of coated steel showed that adhesion of electroless nickel coatings was superior to that of sputter deposited nickel. (C) 2003 The Electrochemical Society.