Although atom transfer radical polymerization (ATRP) is often a controlled/ living process, the growth rate of polymer films during surface-initiated ATRP frequently decreases with time. This article investigates the mechanism behind the termination of film growth. Studies of methyl methacrylate and methyl acrylate polymerization with a Cu/tris[2-(dimethylamino)ethyl]amine catalyst system show a constant but slow growth rate at low catalyst concentrations and rapid growth followed by early termination at higher catalyst concentrations. For a given polymerization time, there is, therefore, an optimum intermediate catalyst concentration for achieving maximum film thickness. Simulations of polymerization that consider activation, deactivation, and termination show trends similar to those of the experimental data, and the addition of Cu(II) to polymerization solutions results in a more constant rate of film growth by decreasing the concentration of radicals on the surface. Taken together, these studies suggest that at high concentrations of radicals, termination of polymerization by radical recombination limits film growth. Interestingly, stirring of polymerization solutions decreases film thickness in some cases, presumably because chain motion facilitates radical recombination.