Thick films of TiO2 were prepared on glass and stainless steel substrates using an alkoxide sol-gel process modified by addition of Degussa P-25 powder. The prepared films were characterized by SEM, EDS, XRD and other methods. The TiO2 films obtained from the powder modified sol were compared to films obtained from the alkoxide sol-gel without modification. The films obtained from the modified sol-gel were about ten times thicker for a single dip coating/heat treatment cycle than the films obtained from the sol without powder addition. The prepared thick films were smooth and free of macrocracking, fracture or flaking. The grain size of these films was uniform and in the range 100-150 nm and the films were a mixture of anatase and rutile TiO2. The films obtained from the powder modified sol on the stainless steel substrate were also much harder compared to the films obtained from sols without modification and displayed excellent adhesion to the substrate. (C) 2003 Kluwer Academic Publishers.