TiO2 thin film can be formed from aqueous solution at ordinary temperature and ordinary pressure by using hydrolysis reaction of titanium fluoro-complex. In this study, effect of seed crystal and composition of solution on the formation of TiO2 thin film was investigated. The amount of deposited TiO2 increased with increasing both (NH4)(2)TiF6 and B2O3 concentrations. Crystallinity of TiO2 increased with decrease of (NH4)(2)TiF6 concentration for short soaking period. Addition of suitable amount of seed crystal enhanced the formation of TiO2 thin film particularly for low (NH4)(2)TiF6 concentration and short soaking period.