Periodic submicroscale diamond-cylinder arrays were fabricated on diamond surfaces using two-dimensionally ordered arrays Of SiO2 particles. For the preparation, the diamond surface was etched by means of reactive ion etching with oxygen plasma through two-dimensionally ordered arrays as masks. The etching time has an important influence on the diameter and depth of the diamond cylinders. The Raman spectra of these films indicate that they consist mostly of diamond, with small amounts of sp(2) carbon.