Hydrogenated diamond-like carbon (DLC) films were prepared by using liquid phase electrodeposition technique. The effects of the applied potential and the carbon sources on the deposition process and film structures were studied. It has been found that the organic liquids with high dielectric constants, small viscosities and the methyl group bonding to the polar group are appropriate carbon sources. The increasing of potential improves the formation of sp(3) carbon during the deposition process. In a high electric field, organic molecules are polarized and reacted on the surface of the electrode, turning out DLC and other products. It is believed that the reaction follows a polarization-reaction mechanism. (C) 2003 Kluwer Academic Publishers.