Conventional cemented tungsten carbide-cobalt (WC-Co) microdrills generally have a low cutting efficiency and short lifetime mainly because they operate at very high cutting speeds. Since it is relatively expensive to make microtools it is highly desirable to improve their lifetime and in-service performance. Microtools used to make microelectronic and mechanical systems (M.E.M.S) devices with sharp cutting edges, such as milling or drilling tools need protective coating in order to extend life and improve performance. One method of achieving this objective is to use a suitable surface engineering technology to deposit a hard wear resistant coating, such as diamond. Diamond has excellent mechanical properties, such as ultra-high hardness and a low friction coefficient. One of the most promising surface treatment technologies for depositing diamond onto complex shaped components is chemical vapour deposition (CVD). However, CVD of diamond coatings onto the cemented WC-Co tool has proved to be problematic. Binder materials such as cobalt can suppress diamond nucleation resulting in poor adhesion between the coating and substrate. In this paper the effects of pre-treated substrate material on the coating structure are reported. The morphology and the crystallinity of the as-grown films was characterised by using scanning electron microscopy (SEM). Raman spectroscopy was used to assess the carbon-phase purity and give an indication of the stress levels in the as-grown polycrystalline diamond films. The diamond coated tools have potential applications in micro- and nanomachining of micro-and nano-sized components used in M.E.MS.