Conjugated polymers are among the most promising organic materials for opto-electronic devices. In such applications, the main fabrication problem is to get uniform, defect-free, and reproducible thin films of these materials. In this investigation, an RF plasma reactor was used to produce cross-linked organic thin films from benzene and furan precursors. Uniform thin films of desired thickness were fabricated using this plasma polymerization technique. The composition of the plasma-polymerized films was determined with X-ray photoelectron spectroscopy. Fourier transform infrared spectra of the monomers and plasma-polymerized thin films prepared were compared to analyze the chemical structure of the films. Ultra-violet-visible absorption spectroscopy shows a red shift of 45 nm in lambda(max) for the case of plasma-polymerized benzene films and 52 nm in the case of plasma-polymerized furan films when compared to their respective monomer spectra. Photo luminescence spectra of these films show a blue emission with a broad peak at 460 urn for the plasma-polymerized benzene films and 445 nm for the plasma-polymerized furan films.