CuInSe2(CIS) nanoparticle thin films have been prepared by rf reactive magnetron sputtering from a fan-shaped ternary compound target on low temperature substrates with pure argon gas as the atmosphere. The stoichiometry of the thin films can be easily controlled by the ratios of the ternary elements and sputtering parameters. Regularly shaped and uniform CIS nanoparticle thin films can be deposited on substrates of soda-lime glass, indium-fin-oxide coated glass, monocrystalline silicon, etc. CIS samples have been investigated by atom force microscopy, optical absorption, x-ray photoelectron spectroscopy, x-ray diffraction, and spectrophotometer. 0 2002 American Vacuum Society.