Thin Solid Films, Vol.409, No.1, 98-104, 2002
Surface decomposition mechanism of Ti(OC3H7)(4) on a platinum surface
The decomposition behavior of titanium tetraisopropoxide [TTIP Ti(OC3H7)(4)] on a platinum surface has been studied using the thermal desorption technique. TTIP is dissociated on platinum below 230 K so that the platinum surface is covered with isopropoxy species and hydrogen originating from TTIP. The isopropoxy species adsorbed on the platinum surface are decomposed to acetone at 230 K. Two forms of surface hydrogen exist: molecular and atomic. Molecular hydrogen is desorbed at 230 K and atomic hydrogen is desorbed after recombination at 440 K. At higher dosages. TTIP is not completely dissociated, but some of isopropoxy ligands are still bound to titanium, even at 300 K. These intact ligands of TTIP produce acetone, isopropanol and propylene at temperatures between 300 and 500 K by disproportionation among themselves or by simple decomposition of the Ti-O bond in TTIP.