The structures used in microelectromechanical system (MEMS) such as sensors and actuators have been miniaturized, and the use of macroinstruments in testing mechanical properties has become limited by the physical size of the materials involved. We propose an electrostatically actuated test device for measuring the elastic and yield properties of Al thin films for MEMS applications. The test device we have designed consists of electrostatically actuated micrometer-sized comb drives for loading a suspended beam. The device was fabricated by surface micromachining. On the basis of the test device, the elastic modulus is determined by analyzing the initial linear load-displacement behavior of the suspended beam, and the yield strength is determined as the deviation from linear elastic behavior.