화학공학소재연구정보센터
Thin Solid Films, Vol.407, No.1-2, 209-214, 2002
Change of magnetized plasma performance by inserted voltage biased plate
Two-dimensional profiles of ion saturation current, transverse plasma flow and floating potential were measured in a magnetized r.f. produced plasma, varying an applied voltage on the rectangular metal plate and a filling pressure with a semi-circular earthed plate. It was found that near the plate surface, plasma density was lower and the spatial inhomogeneity of shifted profile was enhanced. This was consistent with the Mach probe measurement and ExB drift behavior (E: electrostatic field, B: magnetic field).