화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Journal of the Korean Industrial and Engineering Chemistry, Vol.13, No.3, 236-240, May, 2002
Export Citation
화학 용액 증착법에 의하여 제조된 Bi4Ti3O12 박막의 특성
Characteristics of Bi4Ti3O12 Thin Films Prepared by Chemical Solution Deposition
김혜인†, 변요한, 윤진구, 최기섭1, 정지원
  • 인하대학교 화학공학부, 인천 402-751
  • 1한국산업기술대학교 화학공학과, 시흥 402-793
Hye In Kim†, Yo Han Byun, Jin Koo Yoon, Ki Sup Choi1, and Chee Won Chung
  • School of Chemical Engineering, Inha University, Incheon 402-751, Korea
  • 1Chemical Engineering Departement, Korea Polytechnic University, Siheung 402-793, Korea
E-mail:
초록
Bismuth acetate와 titanium (di-i-propoxide)bis(acetylacetonate)를 전구체로 사용하여 강유전체 bismuth titanate (Bi4Ti3O12) 박막이 화학 용액 증착법에 의해 증착되었다. Bismuth (Bi)의 함량, final annealing 온도, 그리고 pre-annealing 온도를 주요변수로 설정하여 실험이 진행되었다. Bi 함량이 양론비일 때 박막의 grain 크기가 가장 컸으며, 10% 과량인 용액을 사용한 경우에는 grain의 크기가 작아졌으나 grain들이 조밀하게 성장되었다. Final annealing 온도가 증가할수록 박막은 c 축 방향으로 성장되고 grain의 크기는 증가하였으나 박막은 porous해지는 경향을 보였다. 박막의 물리적 특성을 개선하기 위하여 도입된 pre-annealing의 경우에는 550 ℃에서 10 min 동안 열처리된 박막이 큰 grain을 가지며 grain들이 조밀하게 성장하는 등 가장 우수한 박막 특성을 나타냈다.
Ferroelectric Bi4Ti3O12 thin films were prepared by chemical solution deposition using bismuth acetate and titanium (di-I-propoxide) bis(acetylacetonate) as the precursors. In this experiment, amount of bismuth (Bi) in solution, temperature of final annealing, and temperature of pre-annealing were selected as the main experimental parameters. When a stoichiometric amount of Bi was used, the deposited films contained the largest grains. In the case of using 10% excess of Bi, the grain size decreased but the density of grains increased. As the temperature of final annealing increased, the films were c-axis oriented and the size of grains increased, but they showed a tendency of being porous. The pre-annealing step was employed before the final annealing in order to improve the physical properties of the deposited thin films. The films, which were pre-annealed at 550 ℃ for 10 min, showed the best properties with large grains and dense films.
Keywords:ferroelectric;bismuith titanate;chemical solution deposition;pre-annealing
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