Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.21, No.4, 325-328, 2002 DOI10.1023/A:1017952627051 Export Citation Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment Choi JM, Kim DJ, Kim HI, So MG Please enable JavaScript to view the comments powered by Disqus.
