화학공학소재연구정보센터
Journal of Chemical Physics, Vol.107, No.13, 5212-5216, 1997
Monte Carlo studies of effects of substrate size on water-substrate interaction energy and wafer structure
Water on a planar substrate and on spherical substrates of radii r = 10, 15, and 20 Angstrom are studied at temperatures of 200, 240, 270, and 290 K by Monte Carlo simulations, The average water-water potential energies and the average water-substrate interaction energies are obtained by use of the single point charge model for the water-water interaction and the nonsingular van der Waals potential plus the Born-type repulsive potential for the water-substrate interaction, Water structure and water-substrate interaction energy are shown to be sensitive to substrate cite. (C) 1997 American Institute of Physics.