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Journal of the Electrochemical Society, Vol.148, No.11, C740-C745, 2001
Fabrication of micropores and grooves on aluminum by laser irradiation and electrochemical technique
Micropores and microgrooves were fabricated on aluminum specimens using anodizing, laser irradiation, and electrochemical techniques. In the fabrication of the micropores, aluminum specimens covered with anodic oxide film were irradiated with a pulsed Nd yttrium aluminum garnet laser (i) on open circuit or (ii) under anodic polarization in NaCl solution. The laser irradiation caused the formation of cone-shaped pores, while the laser irradiation under anodic polarization caused the formation of hemispherical pores. In the fabrication of microgrooves, successive procedures of anodizing, laser irradiation, reanodizing at the laser-irradiated area, and stripping of oxide film were carried out. Microgrooves with a 30 mum linewidth and 20 mum depth were obtained.