The spreading mechanism of nonpolar perfluoropolyether films on carbon surfaces is examined in the mesoscopic regime, including both submonolayer and multilayer films. For the submonolayer film, adsorption-desorption is a main mechanism for spreading, and the surface diffusion coefficients increase as the film thickness increases. The driving force for the spreading in the submonolayer regime is the gradient of the disjoining pressure, which is described by the two-dimensional virial equation. For the multilayer film regime, the spreading characteristics are determined by the molecular weight and the disjoining pressure gradient, which is assumed to be purely van der Waals in nature. We adopt a partial slip boundary condition to analyze the multilayer film, which qualitatively explains the dependence of the surface diffusion coefficient on film thickness.