Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.20, No.19, 1779-1781, 2001 DOI10.1023/A:1012583016260 Export Citation The structural and acoustic properties of sputtered aluminum nitride on ST-X quartz Wu S, Wu L, Chang FC, Shen YT, Chang JH Please enable JavaScript to view the comments powered by Disqus.
