Previous Article Next Article Table of Contents Journal of Materials Science Letters, Vol.18, No.5, 415-417, 1999 DOI10.1023/A:1006661507638 Export Citation X-ray photoelectron spectroscopy of sputter-deposited fluorocarbon films Yamada Y, Kurobe T, Yagawa K, Ikeda K Please enable JavaScript to view the comments powered by Disqus.