Journal of Vacuum Science & Technology A, Vol.19, No.6, 2741-2750, 2001
Video analysis of inclusion induced macroparticle emission from aluminum sputtering targets
Molten metal macroparticles emitted from the surface of aluminum sputtering targets during arcing events is an important source of particulate contamination in sputtering. We used high-speed video analysis of arcing from sputtering targets purposefully doped with aluminum oxide inclusions to determine the velocity, trajectory, and relative size of the emitted macroparticles. The results of these analyses show that the molten droplets of aluminum are emitted from the target with velocities ranging from 5 to over 500 m/s. Ejection angles for the observed macroparticles were concentrated at angles of around 30 degrees from the target plane. We also found that only certain arcing events generated video detectable macroparticle emission (similar to 18 % of the arc events). Macroparticle size and velocity did not appear to be related. An estimate of macroparticle temperature based upon the sensitivity of the charge coupled device camera and the observed lack of macroparticle cooling yields an aluminum macroparticle temperature between 1750 and 4000 K. One cathode arc spot was observed on the target surface and the decay in intensity of this spot was used to estimate the cathode arc spot temperature. The cooling rate of a cathode arc spot on the target surface indicated that the arc spot cools by radiation and diffusion and has an initial temperature of 3000 K. This value is consistent with the macroparticle-estimated temperature of 3000 1000 K.