Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.19, No.5, 2709-2709, 2001 DOI10.1116/1.1387049 Export Citation Real-time feedback control of electron density in inductively coupled plasmas (vol 19, pg 750, 2001) Chang CH, Leou KC, Lin C Please enable JavaScript to view the comments powered by Disqus.
