Journal of Vacuum Science & Technology A, Vol.19, No.4, 1708-1711, 2001
Design and operation of scroll-type dry primary vacuum pumps
Since being rediscovered three decades ago, scroll technology has been successfully adapted to vacuum use. Several innovations have allowed scroll-type pumps to produce vacuums lower than 10 mTorr; the pumps are used in many applications requiring an inexpensive, dry, long-lived pump. In this article, we detail the scroll design procedure, focusing on the trade offs between the need for sufficient vacuum and low manufacturing cost. As an illustrative example, we consider the design requirements for a high helium compression scroll design for use in leak detectors. We also present guidelines for proper pump operation, including the need for gas ballasting, high-water operation, and proper pump isolation schemes.