화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.19, No.1, 228-231, 2001
Thin-walled vacuum chambers of austenitic stainless steel
It is proposed and recommended that vacuum chambers and systems to be built of austenitic stainless steel should be designed for the thinnest walls possible, consistent with structural integrity under atmospheric pressure. The reason for this design goal is to greatly reduce the time, effort, and cost needed to outgas the chambers to reach the desired and specified vacuum level. Of course, this is directly contrary to the universally accepted concern with permeation of atmospheric hydrogen. This permeation has recently been shown to be greatly exaggerated. Atmospheric permeation is at least 100 times less than previously estimated, and is possibly nonexistent. Errors in the previous estimate will be briefly summarized. A proposed outgassing process for hydrogen differs from the accepted process. In this proposal, room temperature outgassing is single sided, occurring only on the vacuum side. The residual concentration distribution of hydrogen in the wall is a quarter sine wave with zero on the vacuum side and peak on the air side. At bake temperatures the distribution becomes uniform, the same as the initial distribution, but at a lower concentration. Subsequent room temperature outgassing follows the same equations as the initial, but with reduced rate and with zero time reset to the end of bake.