Titanium dioxide (TiO2) thin films have been prepared on microscope slide by the sol-gel process. The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discussed. And the TiO2 thin films had been studied by the means of differential thermal analysis (DTA), X-ray diffraction (XRD) and scanning electron microscopy (SEM).