화학공학소재연구정보센터
Thin Solid Films, Vol.391, No.2, 167-175, 2001
Factors influencing the gas sensing characteristics of tin dioxide films deposited by spray pyrolysis: understanding and possibilities of control
The main structure and electronic parameters of SnO2 thin films are considered from the point of view of optimization gas sensor characteristics. The results of phenomenological modeling and their comparison with experiments are used for choosing the correct film parameters and modes of deposition for the processing of SnO2 films by the spray pyrolysis method. Optimal deposition conditions were found, allowing one to obtain films with improved sensitivity, selectivity, low temperature sensitivity maximum position and low response times without additional doping by metal catalysts.