화학공학소재연구정보센터
Thin Solid Films, Vol.390, No.1-2, 243-247, 2001
Study on formation process of surface plasma
A suitable equation group used to describe the establishment process and characteristics of induced dielectric barrier discharge (IDBD) plasma have been determined. Some experiments have been done which are used to examine whether the equation group is right or not. The examination results show that the equation groups are correct and can be used to design an IDBD device.