화학공학소재연구정보센터
Thin Solid Films, Vol.388, No.1-2, 183-188, 2001
Fabrication and electric properties of LaCoO3 thin films by ion-beam sputtering
We have successfully produced LaCoO3 thin films by ion-beam sputtering and subsequent heat treatment. The compacts of La2O3 and CoO powder mixture were used for the targets. The films were mainly composed of the LaCoO3 phase, with a very small amount of an unidentified second phase. The resistivity at room temperature for the annealed 50 at.% La sample was determined to be 51 Omega m, whereas at high temperature, the resistivity was found to be same order of that for bulk LaCoO3, that is, comparable to the resistivity for metals. The possibility of a metal-insulator transition is described.