화학공학소재연구정보센터
Thin Solid Films, Vol.387, No.1-2, 111-114, 2001
Reaction mechanism and kinetics for the chemical bath deposition of In(OH)(x)S-y thin films
The solution chemistry of InCl3-CH3CSNH2-CH3COOH (InCl3-TA-HAcO) system has been studied and the species distribution diagrams, solubility and precipitation curves have been calculated. At an acidic pH (1-4), the (InCl3-TA-HAcO) solution contains mainly indium-chloro-complexes and In(OH)(3) precipitation is not expected when HAcO is added. Kinetic calculations based on TA hydrolysis have shown that indium hydroxide-sulfide [In(OH)(x)S-y] precipitation takes place through a mechanism faster than TA hydrolysis, probably a direct reaction between TA and any indium-chloro-complex, leading to different products depending on the pH of the deposition solution.