We tried to treat poly (vinyl fluoride) (PVF), poly(tetrafluoroethylene-co-hexafluoropropylene) (FEP) and poly(tetrafluoroethylenei-o-perfluoro [alkyl vinyl ether]) (PFA) films by atmospheric pressure glow plasma to increase their adhesive strength with an epoxy resin. Their adhesive strength could be improved; the maximum peel force values obtained from a 180 degrees peel test were over 2.00, 0.90 and 0.62kgf 20 mm(-1), respectively. These values were near or higher than those of the control sample films treated by a surfactant: 1.06, 0.47 and 0.70kgf 20 mm(-1), respectively. In this study, we found that the O-2/He plasma-treated films had the highest peel forces although their contact angles were highest and their amounts of incorporated oxygen or nitrogen atoms were least; He plasma treatment also showed better effects on the overall results.